TEL chambers from type TE-8500 and Unity still run with polyimide ESCs. Ceramic ESCs from CE-MAT with improved design and materials fot he functional surface ingrease the part‘s lifetime and process performance.

The more modern machines from type DRM, SCCM or Telius run with expensive ceramic ESCs. Therefor CE-MAT provides cost effective alternatives. The ceramic ESCs fits perfectly on the given geometries for application.

The following table gives an overview about the available EScs.ESCs:

 

 

Size Model Process Material P/N Remarks
6″ TE-8500 Oxide Polymide 1810-121296-12 New / Repair
8″ TE-8500 Oxide Polymide 1885-022352-17 New / Repair
8″ TE-8500 Oxide Polymide 1810-120900-13 New / Repair
8″ TE-8500 Oxide Polymide 1810-121603-11 New / Repair
8″ TE-8500 Oxide Polymide 1810-121188-11 New / Repair
8″ TE-8500 Oxide Polymide 1810-121189-12 New / Repair
8″ SCCM Oxide AI203 Plate 1810-121880-11 New / Repair
8″ DRM Oxide AI203 Plate 1D85-006979-12 New / Repair
8″ SCCM Oxide AI203 Plate 1810-121880-11 New / Repair
8″ DI(EM) Oxide AI203 Plate New
12″ Telius Poly AI203 Coating 3D87-002056-12 Repair
12″ Telius Oxide AI203 Coating 3D87-003746-12 Repair