TEL chambers from type TE-8500 and Unity still run with polyimide ESCs. Ceramic ESCs from CE-MAT with improved design and materials fot he functional surface ingrease the part‘s lifetime and process performance.
The more modern machines from type DRM, SCCM or Telius run with expensive ceramic ESCs. Therefor CE-MAT provides cost effective alternatives. The ceramic ESCs fits perfectly on the given geometries for application.
The following table gives an overview about the available EScs.ESCs:
| Size | Model | Process | Material | P/N | Remarks |
|---|---|---|---|---|---|
| 6″ | TE-8500 | Oxide | Polymide | 1810-121296-12 | New / Repair |
| 8″ | TE-8500 | Oxide | Polymide | 1885-022352-17 | New / Repair |
| 8″ | TE-8500 | Oxide | Polymide | 1810-120900-13 | New / Repair |
| 8″ | TE-8500 | Oxide | Polymide | 1810-121603-11 | New / Repair |
| 8″ | TE-8500 | Oxide | Polymide | 1810-121188-11 | New / Repair |
| 8″ | TE-8500 | Oxide | Polymide | 1810-121189-12 | New / Repair |
| 8″ | SCCM | Oxide | AI203 Plate | 1810-121880-11 | New / Repair |
| 8″ | DRM | Oxide | AI203 Plate | 1D85-006979-12 | New / Repair |
| 8″ | SCCM | Oxide | AI203 Plate | 1810-121880-11 | New / Repair |
| 8″ | DI(EM) | Oxide | AI203 Plate | New | |
| 12″ | Telius | Poly | AI203 Coating | 3D87-002056-12 | Repair |
| 12″ | Telius | Oxide | AI203 Coating | 3D87-003746-12 | Repair |
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