The production of the CESCs provided by CE-MAT is a single piece fabrication with high precision CNC machining with anodisation and ceramic coating including surface polishing according Semi-standard. Only high pure materials are used, that are qualified in the semiconductor industry.
The ESCs for process chambers from AMAT, Lam Research and TEL fit perfectly to the standard OEM cathodes and bases. Electrical connection, gas supply and cooling of the ESC body work plug and play like. Outstanding process performance and lifetime of the parts are guaranteed. Quality inspections including a vacuumtest under process like conditions are done as 100 % control.