Special Boats made of silicon

Special Boats made of silicon

CE-MAT also supplies special boats with removable wafer holders.

The boats consist of a base body with precisely fitting seats for the individual wafer holders.

It is possible to replace individual holders in case of damage or change of the design.

Normally such boats are made of quartz glass. Here it is impossible to exchange the individual wafer holders as they are firmly welded to the main body of the boat.

If the quartz boat is damaged, repair is very expensive or may not be possible.

The special boat made of silicon have an enormous cost advantage over the conventional solution in quartz glass due to the possibility to exchange individual wafer holders